Influence of Shape Factor of a Beam Cross-Section on a Heat Transfer Process of the Electrothermal V-Shaped Micro Actuators

This paper proposes a method to determine the shape factor in heat transfer model of silicon electrothermal V-shaped micro actuators by using ANSYS WORKBENCH. The rectangular cross-section (w-width and h-thickness) is built investigate from beam substrate through thin layer air. Moreover, this can be used influence width thickness or height on its factor. Through simulation, lowest emission generated when height-to-width ratio (h/w) about 3 4. proportional as well air gap between V-beam substrate. objective provide an effective theoretical also applied similar models other actuators.